The enhanced adhesion of Cu films on Si substrates under MeV Cl ion beam irradiation was studied through analysis of Scanning Auger Microprobe (SAM) and Secondary Ion Mass Spectroscopy(SIMS).
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- 本文通过用扫描俄歇微探针(SAM)和二次离子质谱(SIMS)分析了高能氯离子注 入Cu/Si系统,对Cu薄膜附着力增强效应进行了研究。