The fabricated devices show the performance compared with that of a fully-depleted SOI MOS FET, even though the process needs to be improved further.

  • 尽管制备工艺尚须进一步优化,但所制成的双栅晶体管已呈现了可与常规全耗尽SOI MOS FET相比拟的器件特性。
目录 查词历史