The fabrication technology of single-element-semiconductor quantum dots is introduced in this paper, including RF magnetron sputtering, Si ion implantation, chemical vapor deposition, sol-gel method.

• 介绍了单元素半导体量子点的制备方法，包括射频磁控溅射技术、硅离子注入技术、化学气相沉积法、溶胶-凝胶法等；