The fill factor and F number of refractive microlens array fabricated by melting photoresist are increased by reducing developing time.

  • 摘要采用缩短显影时间法改善了光刻胶热熔法制作微透镜阵列的工艺,提高了折射型微透镜阵列的F数(F(上标%23))与填充因子。
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