The influence of vibration has already become one of main obstacles for improving the nano measuring accuracy, the technique of anti-vibration, vibration isolation, vibration compensation turns into a big branch in nano measuring field.

• 振动的影响是提高纳米测量精度的主要障碍,因此,抗振、隔振、振动补偿技术成为纳米测量领域的一大分支。