The influences on the measuring accuracy of an AOM heterodyne interferometer are analyzed in detail. Methods to eliuminate the influences are proposed and identified: employing two AOMs and obtaining its reference signal from the interferometer.

• 分析了在外差干涉仪中应用它们对测量精度的影响， 提出了消除这些因素影响的方法： 利用双声光调制器外差干涉， 并在干涉仪的内部提取测量的参考信号。