The mechanism of anisotropic etching the construction design of silicon anisotropic etching and two-side etching technology to produce microaccelerometer have been discussed in the paper.
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- 本文讨论了各向异性腐蚀的机理;硅的各向异性腐蚀设计;双面光刻等与微硅加速度计有关的超精细加工问题。