The polished InP substrate is put in the dense etchant of HCl,a etched groove pattern can be observed on the polished surface,It can be found that the orientation of the etched grooves is coincided with[110]on(001) InP.

• 将去掉机械划痕的 InP 衬底放入浓 HCl,发现腐蚀出的条形沟方向是和片子的[110]方向一致。