The problem in practical measurement of the oxygen content in ITO target materials using EPMA has been discussed in this study.

• 本文将探讨EPMA测量ITO靶中氧含量时所遇到的问题,针对ITO靶材材质自身的特点,采用不同于传统EPMA测量方法,准确地测量了ITO靶材中的氧含量。