The relation between form errors of the flat mirror under test and wave-front aberrations, i.e., influence function, can be obtained through sampling the pupil plane.

  • 摘要通过在光瞳面上取点的方法,找出被检平面镜面形误差与检验系统波像差之间的相互关系,即影响函数。
目录 查词历史