The results show that DLC films prepared by UBMS have wider transparent region, of which the max.transmittance of DLC films deposited on Ge subst...

• 结果表明；非平衡磁控溅射制备的无氢DLC膜具有较宽的光谱透明区；锗基底单面沉积DLC膜；其峰值透射率达到61.；4%25；接近理论值。