The results show that laser damages markedly depend on the film growth techniques. For example,the laser-induced damage thresholds of the DLC films grown by PVAD and by UBMS are 0.6 J/cm2 and 0.3 J/cm2,respectively.

• 本文采用脉冲真空电弧(PVAD)和非平衡磁控溅射(UBMS)技术沉积了DLC膜；对两种DLC膜抗激光损伤特性进行了研究；测试结果表明；两种技术沉积的DLC薄膜激光损伤阈值分别0.；6 J/cm2和0