The sensor, which is composed of two electrodes made of platinum and a micro reaction cell made of SU-8 photoresist, is fabricated on silicon wafer using the Micro-Electro-Mechanical Systems (MEMS) technology.

  • 该传感器采用微电子机械系统(MEMS)技术制备,以硅片作为基底,由铂制备的平面双电极结构以及SU-8光刻胶制备的微反应池所构成。
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