The testing technique and system of the newly developed, miniaturized sputtering ion pump with low pumping speed has been developed in accordance with the standards formulated by machine industry.

• 摘要本文介绍了小抽速微型溅射离子泵的性能测试系统和参考机械行业标准确定的测试方法，探讨了测量结果误差来源。