The thermo-mechanical noise and electrical noise of MEMS torsional pendulum accelerometer are analyzed respectively,in which the sensitive signal is detected by capacitive or photoelectric circuits.

• 在高精度MEMS扭摆式加速度计电容检测和光电检测实现原理的基础上,分析了该加速度计热机械噪声和电学噪声特性。