The two major techniques used are Chemical Vapour Deposition (CVD) and Physical Vapour Deposition (PVD).These can result in the deposition of two-dimensional blanket or patterned thin films.
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- 因此本实验中将凹形及矩形之铜箔以叠加方式组合成一电极群,并藉由微细放电加工方法加工出具有数十道槽状的微细散热片。