The ultrasonic bonds, after bonding and aging, of Au wire bonded on the Al metallization pad were analyzed by Scanning Electronic Microscopy(SEM) with Energy Dispersive X-Ray Spectrometer(EDX).

• 本文采用电子扫描电镜(SEM)及X射线能谱(EDX)分析了Au丝与Al金属化层焊盘键合后在老化过程中界面处元素的分布规律以及化合物的演变过程。