Thermodynamic analyses for the superhard inorganic material, such as SiC, Si 3N 4,TiC,TiN and so on, nanosized powder CVD synthesis processes were made systematically.
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美
- 通过热力学分析研究了超硬无机材料,如SiC、Si3N4、TiC、TiN等纳米粉末的化学气相沉积(CVD)合成反应过程和核化过程的有关热力学规律。