Thirdly, the structure and morphology of Si nanodot arrays were evaluated by X-ray diffraction spectroscopy (XRD), Fourier transition infrared spectrum (FTIR), scanning electron microscopy (SEM) and transmission electron microscopy (TEM).

• 利用X射线衍射仪(XRD)、红外吸收谱、拉曼光谱、扫描电子显微镜(SEM)和透射电子显微镜(TEM)等表征手段观察分析了Si纳米晶阵列的微结构及表面形貌。