This design doubles the sensitivity by putting the piezoresistor on the surface of the vertical sidewall of the cantilevers, compared with conventional design.

• 传感器采用在深槽侧壁（悬臂梁弯曲的表面）制作压阻的方法，灵敏度比在硅表面上制作压阻的传统器件高近一倍。