This micro-actuator was made by using a high-speed tape-casting technique to deposit Pb(Mg_(1/3)Nb_(2/3))O_3-Pb(Zr_(0.52)Ti_(0.48))O_3(PMN-PZT) multiplayer films and applying screen-printing processes to fabricate Ag/Pd electrodes.

• 该元件采用高速流延工艺制备Pb(Mg1/3Nb2/3)O3-Pb(Zr0.；52Ti0