This paper presents a new fuzzy predictive control method for the MOCVD device control system set to handle the non-linearity,time variability and large delay of plant controls.

• 为解决金属有机化合物化学气相淀积(MOCVD)设备温度控制的非线性、时变性以及大滞后等问题,给出了一种用模糊控制和预测控制相结合的复合控制方法。