This paper takes use of the features of ultrasonic grinding which can make the macroscopic force, stress and calory in grinding lower, and then utilizes relevant abrasive in the ultrasonic grinding.

• 本文利用超声加工宏观磨削力、磨削应力、磨削热小，对加工材料表面损伤低的特点，再结合相关磨料对高精度超薄水晶片表面进行超声磨削加工。