Thus good positive resists should have a glass transition temperature above the highest temperature to which the resist will be subjected after development of the irradiated pattern in it.

  • 如此好积极的阻体应该有在最高的温度上面的玻璃转变温度到哪一个阻体将会在被照耀的式样的发展之后被在它里面服从。
目录 查词历史