TiO 2 thin films were prepared by chemical vapour deposition(CVD) with the source of tetra iso propyl titanate (Tiliso OC 3H 7) 4,TPT) and its optical properties are studied.
英
美
- 以四异丙醇钛(简称TPT)为钛源物质,采用常压化学气相沉积(CVD)法制备了TiO2膜,并对其光学性质进行了研究。