To achieve precision positioning and large movement range,by using VCM and compliant mechanism,a precision positioning stage is designed in this paper,which can achieve high degree of accuracy in fixed movement range.

• 音圈电机与柔顺机构的结合,设计了一个在固定运动范围内具有高精度定位能力的精密定位平台,分析了平台参数的确定方法。