Two typical cases in microprobe, multielectrode array (MEA) and micro-force sensor, have been applied for illustrating the variety of fabricating MEMS micro-probes.
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- 文中发展两种微探针之制作,包含整合导线且具有适当绝缘之微电极阵列,以及整合平板与弹簧之微力感测器元件结构,以阐述微机电制程制作微探针的多样性。