Under normal operation condition (at 27 degree Celsius, 1 atm) the hysteresis of a 1 micron-thick sensor is record when the relative humidity of chamber goes up from 20% to85%, and then goes down to 20% with a step of 5% RH.

• 湿度传感器的灵敏度对于不同的聚酰亚胺厚度也不同；2.；5微米厚的聚酰亚胺灵敏度在线性范围内灵敏度为6fF/%25RH；敏感膜厚度为1微米时传感器灵敏度在线性范围内灵敏度为5fF/%25RH。