Using the pressure-frequency characteristic, the GaAs cantilever acoustic sensor based on RTD is designed and processed by the control hole technology firstly, and the process integration of RTD and micro-mechanical technology is implemented.

• 利用此压力-频率转换特性；首次设计并利用微机械控制孔技术加工制作了基于RTD的GaAs基悬臂式声传感器结构；实现了RTD与GaAs基微机械加工技术的工艺集成.