Varied line-space gratings (VLS) have great advantages in aberration-correction, and the different spectral properties will be gained using the VLS with different rules of spacing.

• 摘要变栅距衍射光栅(VLS)在像差校正等方面具有突出优点，采用不同的栅距变化规律的变栅距光栅具有不同的光谱特性，因而在众多的高技术领域获得了广泛应用。