We have also studied the impacts of various experimental conditions for polysiliconnucleation in ELO processes, and found out the optimum growth condition for inhibition poly-silicon and realization lateral overgrowth simultaneously.

• 并着重针对ELO过程的特点；通过大量实验研究了各种条件对成核的影响；找到了既能完全抑制多晶成核又能实现侧向生长的最佳工艺条件.