With the increasing of air or CO2 in reaction gases, the microhardness of Ti(CNO) films can be raised. And the highest micro-hardness of Ti(CNO) film appears when the flow rate of air is 40ml/min or CO2 15ml/min.

• 随着反应气体中空气或CO_2气体流量的增加；Ti(CNO)薄膜的硬度呈上升趋势；并在空气的流量为40ml/min或CO_2的流量为15ml/min时(分别约占总量的15%25和6%25)、薄膜的硬度达到最大值.