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- Research on Bulk Silicon Etching for Piezoelectric Miniature Microphone and Capacitive Miniature Microphone 用于压电和电容微麦克风的体硅腐蚀相关研究
- bulk silicon etching 体硅腐蚀
- It is necessary to measure Young's modulus of micro-mained materials because of the special manufacture process by using silicon etching technique. 摘要利用蚀刻矽技术制造的微机械构件，由于特殊的制作工艺而需要对其材料的杨氏模量进行测量。
- One package method of LED chip based on MEMS technology is proposed, a reflector formed by hulk silicon etching is used for LED chip. 本文提出了一种基于MEMS的LED芯片封装技术，利用体硅工艺在硅基上形成的凹槽作为封装LED芯片的反射腔。
- It is necessary to measure the mechanical properties such as Yong's modulus of micro\|machined materials because of the special manufacturing process by using silicon etching technique. 利用蚀刻硅技术制造的微机械构件,由于特殊的制作工艺而需要对其材料的机械性能如杨氏模量等进行测试。
- Mimiwaty, M. N., Badarich, B., "The Effects of Temperture and KOH Concentration on Silicon Etching Rate and Membrane Surface Roughness, "IEEE and Burhanuddin Yeop Majlis, pp.524-528 (2002). 黄尧民，"光纤式悬臂梁结构微型压力感测器"，私立中原大学，硕士论文，民国九十二年。
- bulk silicon dissolved wafer process 体硅溶片工艺
- Keywords Micromachining;Sensor;Silicon Etching; 微机械加工;传感器;硅腐蚀;
- Micro-vibration sensors fabricated by bulk silicon technology 体硅工艺微振动传感器的研制
- A STUDY ON SILICON ETCHING AT LOW RATE AND TUNGSTEN FILM ETCHING 硅低速刻蚀和钨膜刻蚀研究
- INTEGRATED CIRCUIT (IC): Small wafers of silicon etched or printed with extremely small electronic switching circuits; also called CHIPS. 集成电路：刻有或者印有非常小的电子开关电路的小硅晶片；也称作CHIPS。
- Do they charge carriage by bulk? 他们是否按体积计算运费？
- PACKAGING OF WAVEGUIDE DEVICES BASED ON BULK SILICON MEMS TECHNOLOGY 基于体硅微机械工艺的光波导器件封装技术
- In most markets you can buy fresh fruit in bulk. 在大多数市场上可买到散装新鲜水果。
- The bulk of the work has already been done. 大部分工作已经完成。
- The elephant lowered its great bulk. 大象蹲下它庞大的身躯。
- That is a beautiful etching of a bird. 那是一只鸟的漂亮的蚀刻画。
- We present compensation of convex corners and fabrication technology of cantilever beam, which is manufactured on (100) silicon etched by EPW, and take use of spherical mask to compensate them. 研究采用EPW腐蚀(100)硅片制作微悬臂梁的凸角补偿方法及制作工艺，给出采用圆形掩膜对(100)硅凸角进行补偿。
- Normally for bulk glass, etching increases the strength. 对于块状玻璃，腐蚀通常都使强度提高。
- He heaved his huge bulk out of the chair. 他挺起巨大的身躯，从椅子上站了起来。
