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- A dry etch technology for poly-silicon using Cl2, SF6 and N2 mixed gas has been developed on Tegal 1512e. Different effects of positive resist mask for LDD and SiO2 mask for SST on the process are discussed. 在Tegal1512e设备上,采用Cl_2、SF_6、N_2混合气体,开发了多晶硅干法腐蚀工艺,讨论了LDD的正胶掩膜及SST的SiO_2掩膜对工艺的不同影响。
- Inductively Coupled Plasma Dry Etch of InSb Thin Film 感应耦合等离子体干法刻蚀锑化铟薄膜研究
- The principle and the main parameters of the dry etching for silicon dioxide are introduced. 摘要阐述了二氧化矽干法蚀刻的原理和主要的蚀刻参数。
- To approach as a resist in dry etching processing, etching properties of the films in oxygen plasma have been investigated. 为了探索该种薄膜在干刻蚀工艺过程中用作掩膜的可能性，还研究了它在氧离子体中的刻蚀性能。
- With the principles and processes of photolithography,dry etching and wet etching,the fabrication of the head slider were experimented. 然后利用光刻、湿法刻蚀和干法刻蚀的工艺及设备,分别进行了该磁头滑块结构的湿法和干法刻蚀试验,给出了刻蚀参数及所加工的磁头照片;
- PI (6FDA/BAPS) and PI (DSDA/HFBAPP) are verified including structure, viscosity, sensitivity, contrast, thermostabibity, dry etching resistance and other lithography parameters. 将合成之PI(6FDA/BAPS)与PI(DSDA/HFBAPP)做一连串基本性质鑑定与微影性质测试，结果证明此二种聚亚醯胺都具有优良电子束阻剂之特性。
- In addition, we reduced the air columns around the cavity and simulated the photonic bandgap and fabricated the devices by E-beam lithography and deep dry etching process. 未来将会对共振腔的几何形状做修正来符合光传播时的场型，并以此设计做出元件并加以量测。
- A Dry Etch Technology for SiO2 Sidewall in LDD and SST Device Structures 用于LDD和SST的SiO_2边墙干法腐蚀工艺研究
- I dry my hands and face with the towel. 我用毛巾擦干了双手和面部。
- The old well was bricked up when it ran dry. 旧井干枯以后被人用砖堵上了。
- The road is only negotiable in the dry season. 这条道只有在旱季才能通行。
- Ida was choking with the dry air. 空气干燥，艾达感到喘不过气来。
- After two layers of SiO2/ SiON with different refractive are finished, the designed mask pattern is printed on the film by photolithography, then through ICP for dry etching, the waveguide structures are obtained, for example AWG/EDG we obtained. 两层不同折射率的二氧化硅/氮氧化硅薄膜制备好后，再根据设计好的波导图形，经过光刻，感应耦合等离子体刻蚀(ICP)等工艺，制成所需要的光波导器件，如本研究中心制成的AWG、EDG等。
- The wet clothes will soon dry in the sun. 湿衣服在太阳下很快就会干的。
- A good hot summer could dry the ground out. 一个炎热的夏天可以将大地干透。
- I had kept my matches dry and soon struck a light. 我没让我的火柴受潮，我一擦就擦着了。
- The clothes will soon dry up in the wind. 这衣服经风一吹很快就会干的。
- It must have taken a lot of time to etch that. 蚀刻这个图案一定花了不少时间。
- The doctor asked the drinker to dry out. 医生要那个酒徒戒掉酒瘾。
- Your clothes will take ages to dry out. 你的衣服要很长时间才能乾透。
