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- The ZrN films were deposited by RF magnetron reactive sputtering system. 使用反应性磁控溅镀系统成长氮化锆薄膜。
- Aluminum nitride (AIN) thin films have been successfully deposited on Si(100) and Pt/Ti/Si(100) by DC magnetron reactive sputtering. 采用直流磁控反应溅射法,在Si(100)和Pt/Ti/St(100)上制备了具有较好(002)择优取向性的AlN薄膜。
- S. B. Krupanidhi and M. Sayer,”Position and Pressure Effects in RF Magnetron Reactive Sputter Deposition of Piezoelectric Zinc Oxide” ,J.Appl.Phys.,vol. 56,pp. 3308,1984. 魏清梁，固态微型谐振器之压电层与反射层研制，国立中山大学电机工程研究所，硕士论文，2005.
- radio frequency(RF) magnetron reactive sputtering 射频磁控反应溅射
- DC magnetron reactive sputtering 直流磁控溅射
- RF magnetron reactive sputtering 射频磁控反应溅射
- R.F. magnetron reactive sputtering 射频磁控溅射
- magnetron reactivity 磁控管反应性
- Oxidation Resistance of Magnetron Reactive Sputtering CrN Films 磁控反应溅射沉积CrN薄膜的抗氧化性研究
- Plasma magnetron reactive sputter deposition technique 磁控反应溅射技术
- They differ in solubility and chemical reactivity. 它们在溶解度和化学反应活性上有差别。
- Stability and Reactivity The product is stable. 稳定性与反应特性这个产品是稳定的.
- Organometallic Reagents, Reactivity and Basicity. 醇的合成（已知方法和新的策略）。
- The Alkene Double Bond: A Focus of Reactivity. 21烯烃的双键：重点是反应活性。
- AlN Piezoelectric Thin Film Prepared by Reactive Magnetron Reactive Sputtering 衬底温度对反应磁控溅射制备AlN压电薄膜的影响
- The results show that metakaolin has a high hydration reactivity. 结果表明偏高岭土具有较高的水化活性。
- How is hyperplasia of reactivity lymph node treated? 反应性淋巴结增生怎样治疗？
- Steel reactivity will affect the extent of underestimation. 钢铁的活性将影响低估的程度.
- Effect of Technical Parameters on Deposition Rate of AlN Films Prepared by Magnetron Reactive Sputtering 工艺参数对磁控反应溅射AlN薄膜沉积速率的影响
- Study of Processing and Properties of AIN Films Prepared by Magnetron Reactive Sputtering 磁控反应溅射AIN薄膜的制备工艺与性能研究
