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- Keywords magnetron sputtering;low pressure chemical vapor deposition（LPCVD）;poly silicon thin film;gauge coefficient;piezoresistive characteristic; 磁控溅射;低压化学气相淀积;多晶硅薄膜;应变系数;压阻特性;
- poly silicon thin film 多晶硅薄膜
- Polycrystalline silicon thin film fabricated with novel laser crystallization. 多晶硅薄膜的新型激光晶化制备方法。
- Industrial batteries in the rapid development of business, the amorphous silicon thin film lithium battery and solar cell project has already started. 工业电池业务处于快速发展之中，锂电池和非晶硅薄膜太阳能电池项目已经启动。
- The products of the company cover solar energy PV cell, its modules, amorphous silicon thin film PV cell, solar energy home system and solar power network system. 公司生产的产品主要包括太阳能电池,太阳能电池组件,非晶硅薄膜电池,太阳能家用系统,太阳能并网系统等。
- PLED(polymer light emitting diode) and a-Si TFT(amorphous Silicon thin film transistor) technology have made great progress in the past few years. Combination of two technologies is expected to be the mainstream of future flat televisions. 近年来,PLED(聚合物发光二极管)和a-SiTFT(非晶硅薄膜晶体管)技术取得了巨大进展,两者的结合有望成为未来平板电视的主流。
- It also points out that the higher electricity generating efficiency and lower cost will be obtained if polycrystalline silicon germanium (poly-SiGe) alloys is used as solar energy materials compared with polycrystalline silicon thin film (poly-Si). 文章阐明用多晶锗硅薄膜作为太阳能电池材料，能获得比多晶硅薄膜太阳能电池更高的发电效率和更低的成本。
- The optimization of the structure of a polycrystalline silicon thin film transis tor by excimer laser crystallization of amorphous silicon and its fabrication pr ocess have been discussed. 讨论了用准分子激光诱导非晶硅晶化法制备多晶硅薄膜晶体管的结构与工艺优化问题。
- The silicon thin films on glass substrate were prepared using microwave ECR plasma source enhanced magnetron sputtering. 摘要利用微波ECR等离子体增强磁控溅射沉积技术在玻璃表面制备了矽膜。
- Polycrystalline silicon thin films were prepared by hot-filament chemical vapor deposition(HFCVD) on glass at low-temperatures. 采用热丝化学气相沉积法(HFCVD)在普通玻璃衬底上低温沉积多晶硅薄膜。
- nano-crystalline silicon thin film 纳米硅薄膜
- microcrystalline silicon thin film solar cells 微晶硅薄膜太阳电池
- microstructure of silicon thin film 硅薄膜微结构
- mierocrystalline silicon thin film 微晶硅薄膜
- poly-crystalline silicon thin film 多晶硅薄膜
- amorphous silicon thin film solar cell 非晶硅薄膜太阳能电池
- polycrystalline silicon thin film solar cells 多晶硅薄膜电池
- microcrystalline silicon thin film 微晶硅薄膜
- polycrystalline silicon thin film 多晶硅薄膜
- Preparing Polycrystalline Silicon Thin Films by RTA 利用快速热退火法制备多晶硅薄膜
