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- Abstract: The vanadium oxide thin films have been prepared by DC magnetron sputtering. 摘要：本文用直流磁控溅射法来制备氧化钒薄膜。
- phase transition vanadium oxide thin films 相变氧化钒薄膜
- vanadium oxide thin film with nanostruture 纳米氧化钒薄膜
- Study on pulse laser damage of vanadium oxide thin film 氧化钒薄膜脉冲激光损伤研究
- Fabrication and Property Study of Vanadium Oxide Thin Films with Nanostructure for Infrared Microbolometer Application 红外微测辐射热计用纳米氧化钒薄膜的制备和性能研究
- Structure Characterization of Vanadium Oxide Thin Films Prepared by Magnetron Sputtering Methods 磁控溅射制备的氧化钒薄膜的结构研究
- Vanadium oxide thin films as the cathode in lithium micro-battery prepared by RF magnetron sputtering technology 氧化钒薄膜作为锂离子微电池阴极膜的磁控溅射技术的制备
- Characteristics Analysis and PSPICE Model of Vanadium Oxide Thin Film Resistance 氧化钒薄膜电阻PSPICE模型及特性分析
- Keywords electrochromism;vanadium oxide thin film;optical properties;magnetron_sputtering; 致变色;氧化钒薄膜;光学性质;磁控溅射;
- Keywords vanadium oxide thin film with nanostruture;bolometer;temperature coefficient of resistant（TCR）;facing targets d.c. magnetron sputtering; 纳米氧化钒薄膜;测辐射热计;温度电阻系数TCR;直流对靶磁控溅射;
- vanadium oxide thin films 氧化钒薄膜
- vanadium oxide thin film 氧化钒薄膜
- Nickel oxide thin films were deposited by de reactive magnetron spu tring. 用直流反应磁控溅射法制备了氧化镍电致变色薄膜，采用XRD和TEM对所制的薄膜结构进行了研究。
- Oxide thin films have been playing an important role in many fields. 氧化物薄膜材料在很多领域中发挥着重要的作用。
- Perovskite oxide thin films and heterojunctions have been fabricated by laser molecular beam epitaxy controlled in atomic scale. 用激光分子束外延,原子尺度控制的外延生长出多种钙钛矿氧化物薄膜和异质结。
- Each gallium oxide thin film prepared in different deposition rate has its own optimal operation temperature. 不同的蒸镀速度所制备之氧化镓薄膜，有不同的最佳感测温度。
- P. Nunes, D. Costa, E. Fortunato and R. Martins, “Performances presented by zinc oxide thin films deposited by r.f. magnetron sputtering,” Vacuum, vol. 64, pp. 293-297, 2002. 水瑞鐏，”氧化锌薄膜特性及其在通讯元件与液体感测器上之应用”，国立成功大学电机工程学系博士论文，(2002)。
- Magnesium oxide thin films on Y-cut lithium niobate single crystal substrate are prepared by sol-gel processing then,a Mg-ion indiffusion process is applied to study its surface characteristics. 利用溶胶-凝胶工艺在Y切铌酸锂单晶基片衬底上制备氧化镁薄膜，经镁离子内扩散后，进行了其表面改性研究。
- With the emergence of micro gas sensors,more attention has been paid to semiconducting metal oxide thin films because of the advantages of high sensitivity,low thermal mass and batch production. 随着微结构气敏传感器的出现，金属氧化物半导体薄膜因具有灵敏度高、热质量小、批量制备一致性好等特点受到日益广泛的重视。
- Keywords vanadium oxide;thin film;magnetron sputtering;annealing;temperature coefficient of resistance（TCR）; 氧化钒;薄膜;磁控溅射;退火;电阻温度系数;
