基于人工神经网络权值优化的投影光刻机像质校正灵敏矩阵的计算方法

基于人工神经网络权值优化的投影光刻机像质校正灵敏矩阵的计算方法的英文翻译

基本释义

• Calculating Method of Image Quality Correction Sensitive Matrix of Lithographic Projection System Based on Weight-Optimizing of an Artificial Neural Network