开发超声提取法评估静电强化颗粒沉淀式晶片存储箱的洁净度

开发超声提取法评估静电强化颗粒沉淀式晶片存储箱的洁净度的英文翻译

基本释义

• Development of an Ultrasonic Extraction Method of Evaluate the Cleanliness of Wafer Storage Boxes Prepared by Electrostatically Enhanced Particle Deposition