甚高频等离子体增强化学气相沉积制备微晶硅太阳电池的研究

甚高频等离子体增强化学气相沉积制备微晶硅太阳电池的研究的英文翻译

基本释义

• Study of microcrystalline silicon solar cells fabricated by very high frequency plasma-enhanced chemical vapor deposition