I is seen that the S parameter of core part in YSZ thin film decrease with the temperature of annealing increasing while the width of transition part in YSZ thin film narrows with the temperature of annealing increasing.

• 研究发现 :YSZ膜心部区 S参数随退火温度升高而降低 ; YSZ膜的过渡区宽度随退火温度升高而变窄 ;