Process review shows that the substrate material is the key factor for the carbon films deposition, and the parameters of ion energy, pressure and methane ratio are impotent also.

• 工艺研究结果表明,衬底材料对制备该新型纳米碳膜具有关键作用,离子能量、工作压力及气氛等工艺因素也具有重要作用。