The relationship between the flow rate of Freon (CCI2F2) and deposition rate and efficiency is obtained.

• 本文研究了不同掺氟量对沉积速率及沉积效率的影响；得出了氟利昂流量与沉积速率及沉积效率之间的变化规律；并试验了沉积温度、热区宽度对掺氟的影响.