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- ECR等离子体ECR plasma
- GaN在Si(001)上的ECR等离子体增强MOCVD直接生长研究(英文)Investigation of GaN Growth Directly on Si (001) by ECR Plasma Enhanced MOCVD
- 微波ECR等离子体Microwave-ECR Plasma
- 微波-ECR等离子体MW-ECR plasma
- 微波ECR等离子体源增强非平衡磁控溅射DLC膜的制备与表征Preparation and characterization of DLC films by microwave ECR plasma source enhanced unbalance magnetron sputtering
- 微波ECR等离子体化学气相沉积diamond-like carbon films
- 微波ECR等离子体参数测量及分析Microwave ECR Plasma Parameter Measurement and Analysis
- 等离子体的分解disassembly of the plasma
- 等离子体光谱plasma spectrum
- 微波ECR等离子体辅助反应蒸发沉积ITO膜ITO Thin Film Deposition by ECR Plasma Enhaced Reactive Evaporation
- 固体中的等离子体振荡plasma oscillation in solids
- 微波ECR等离子体溅射沉积TiN薄膜的研究Study of TiN Thin Film by Microwave ECR Plasma Reaction Sputtering Deposition
- 等离子体中的反常输运anomalous transport in plasmas
- ECR镀膜electron cyclotron resonance deposition
- 等离子体中的粒子碰撞collision between particles in plasma
- ECR-CVDECR-CVD
- 等离子体微观不稳定性microinstability of plasma
- ECR离子源ECR ion source
- 等离子体中X射线激光传输与电子密度诊断的理论及数值比较Propagation of X-ray in the plasma and compare of analytical and simulative solutions about the diagnostics of electric density of plasma
- ECR-PECVDECR-PECVD
