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- Langmuir Probe was used to understand the influence of plasma states . 利用朗缪探针测量手段详细研究了等离子体宏观参数与电子温度和电子密度的关系。
- Langmuir probe is a diagnostic technique of charged parameters in plasma. Langmuir探针是获得等离子体荷电参数的诊断技术。
- Langmuir probe is an important method for diagnostic of the charged particle parameters. Langm uir探针是诊断等离子体荷电粒子参数的重要手段。
- Discharge characteristics of Ar plasma in the MEP were measured with Langmuir probe and ion energy analyzer. 采用朗谬探针和离子能量分析器,测量了MEP中Ar等离子体的放电特性。
- Langmuir probe was used to diagnose the H_2 plasma generated by our home-made apparatus dedicated to this new technique. 利用Langmuir探针方法对线形微波等离子体CVD设备产生的H2等离子体进行的等离子体参数测量表明,在工频半波激励的条件下,H2等离子体的电子温度和等离子体密度分别约为6 eV和1×1010/cm3。
- The properties of spatial distribution of plasma ion density in RF TCP plasma reaction chamber were diagnosed by a Langmuir probe and the effect of air pressure were investigated. 利用朗缪尔静电单探针诊断了射频TCP离子束辅助电子枪蒸发镀膜装置反应室内等离子体密度的空间分布规律;并分析了气压对等离子体分布的影响.
- A volt-ampere curve was gained by giving Langmuir probe a variable voltage. When needed, the result of experimental could be gained immediately by the analyzed software. 通过以锯齿波向Langmuir探针施加电压得到伏安特性曲线,并可快速处理出实验结果。
- Diagnostic test with Langmuir probe of the electron cyclotron resonance (ECR) plasma source was modified to evaluate our lab-built ECR plasma etching system. 摘要电子迴旋共振(ECR)等离子体以其密度高、工作气压低、均匀性好、参数易于控制等优点在超大规模集成电路工艺中获得了广泛的应用。
- Diagnostic test with Langmuir probe of the electron cyclotron resonance (ECR) plasma source was modified to evaluate our lab built ECR plasma etching system. 电子回旋共振(ECR)等离子体以其密度高、工作气压低、均匀性好、参数易于控制等优点在超大规模集成电路工艺中获得了广泛的应用。
- The Langmuir probe was used to diagnose the plasma characteristics in the vicinity of substrate to investigate the relationship between the ion current density, pulse voltage and working pressure. 本文首先利用朗谬耳探针对基底附近的等离子体特性进行了诊断,考察了离子电流密度与脉冲电压和工作气压的关系。
- A Langmuir probe diagnosis system was established to explore the characteristics of MPT plume in vacuum environment. Some important parameters such as electronic temperature and electron density were abtained in nozzle plume. 为了探索微波等离子推力器(MPT)羽流的特性,建立了一套Langmuir探针诊断系统并对MPT的羽流进行了诊断,得出了MPT喷管羽流的电子温度和电子数密度等重要特性参数。
- A Langmuir probe diagnostic system for Arcjet plume is established first in China, in which Langmuir probe is employed to obtain the electron temperature of the Arcjet plume with argon propellant. 本文建立了一套静电探针诊断系统,在国内首次对以氩气为推进剂的电弧加热发动机羽流电子温度进行了测量。
- The distribution of the microwave plasma were measured by Langmuir probe and the temperature distribution of the microwave plasma in quartz tube reactor by the thermal couple meter. 针对矩形波导微波化学反应器,在低气压,低功率,纯甲烷微波放电情况下,用朗缪尔探针测量了石英反应管内等离子体的分布,用热偶计测量了微波等离子体在空间的温度分布。
- Abstract: Langmuir probe technique was used for the plasma diagnostics of double-glow plasma surface alloying process.Effects of the process parameters on plasma parameters were discussed. 摘 要: 用朗缪尔单探针技术对离子渗金属中的等离子体参数进行了诊断, 讨论工艺参数对等离子体参数的影响。
- Diagnosis of MPT plume by using langmuir probe 用Langmuir探针诊断MPT羽流
- multidipole plasma Langmuir probe 多偶极等离子体朗缪尔探测仪
- multi-dipole plasma Langmuir probe 多偶极等离子体朗缪尔探测仪
- During beam injection, the edge electron temperature and density measured with movable Langmuir probes decrease and increase by an order of magnitude within the injection sector,respectively. 在注人口附近区域,用静电探针测得的径向电子温度和密度在超声分子束注入期间分别下降和上升了一个数量级。
- Microwave ECR plasma diagnosis in aPSII system with Langmuir probe PSII系统中微波ECR等离子体的朗缪尔探针诊断
- A Self-compensating Langmuir Probe for RF Plasma Diagnostics 自补偿型射频等离子体探针