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- cyclotron resonance lineshape 回旋共振线形
- Abstract: Amorphous hydrogenated carbon films have been deposited with benzene in an electron cyclotron resonance (ECR) plasma system. 文摘:用苯作源气体在一个微波电子回旋共振离子体系统中沉积了含氢非晶碳薄膜，研究了沉积参数对膜的生长速率的影响。
- Yak hairs were treated by the microwave electron cyclotron resonance plasma reactive ion etching (ECR-RIE) equipment to improve its property of weave. 摘要采用微波电子回旋共振等离子体反应离子刻蚀(ECR-RIE)装置对牦牛毛纤维进行表面改性，从而改善牦牛毛的可纺性。
- High-voltage power supply(HVPS) is one of the important component in ECRH (Electron Cyclotron Resonance Heating). 负高压电源系统是ECRH系统的重要组成部分,其信号的传输是整个系统运行的关键。
- Analysis of biomolecules with Fourier transform ion cyclotron resonance mass spectrometry. 傅氏转换离子迴旋共振质谱术的生物分析。
- In addition, the requirement of delivering 18O2 beams from the electron cyclotron resonance ion source can be satisfied by the obtained 18O2 gas. 此外,制得的气体能够满足电子回旋共振离子源提供18O重离子束的实验要求。
- In this paper the etching (RIE) of poly-Si of the electron cyclotron resonance (ECR) reactive ion using CF 4 and Ar was reported. 报道了用CF4和氩气Ar作为工作气体的ECR反应离子刻蚀多晶硅 (poly Si)技术。
- Then the corresponding sigma matrix is given to further estimate the beam emittance extracted from electron cyclotron resonance ion source. 用旋转矩阵和聚焦矩阵重新推导了总的传输矩阵。
- Amorphous hydrogenated carbon films have been deposited with benzene in an electron cyclotron resonance (ECR) plasma system. 用苯作源气体在一个微波电子回旋共振离子体系统中沉积了含氢非晶碳薄膜，研究了沉积参数对膜的生长速率的影响。
- The numerical method for resolving the wave propagation and absorption of the electron cyclotron resonance(ECR) is proposed. 介绍了电子回旋共振(ECR)波的传播与吸收的数值求解方法。
- The plasma flow stream along the divergent magnetic field in an electron cyclotron resonance(ECR) plasma source has been simulated. 本文建立了一个物理模型，编写了数值程序，模拟了微波电子回旋共振（ECR）等离子体流的特性。
- Abstract The principle of ion cyclotron Resonance mass spectrometer is described andsome examples are given for its application to organic chemistry. 摘要 本文介绍了离子回旋共振质谱计的原理和它在有机化学中的应用。
- A coating on NiTi alloys surfaces was prepared under diethylene glycol dimethyl ether (diglyme) microwave cold-plasma in electron cyclotron resonance conditions. 在微波电子回旋共振低温等离子体条件下,用二乙二醇二甲醚为试剂对镍钛合金进行表面改性。
- The liquid stub tuner is a new-style impedance matching system used on the ion cyclotron resonance heating system in order to supersede the conventional piston stub tuner. 摘要液态调配器是用于离子回旋共振加热系统以代替传统活塞式调配器的一种新型阻抗匹配装置。
- Fluorinated amorphous carbon(a-C:F) films were deposited using C_4F_8 and CH_4 as precursor gases by electron cyclotron resonance chemical vapor deposition (ECR_CVD). 采用电子回旋共振等离子体化学气相淀积(ECR-CVD)法;以C4F8和CH4为源气体制备了非晶氟化碳(a-C:F)薄膜.
- Diagnostic test with Langmuir probe of the electron cyclotron resonance (ECR) plasma source was modified to evaluate our lab-built ECR plasma etching system. 摘要电子迴旋共振(ECR)等离子体以其密度高、工作气压低、均匀性好、参数易于控制等优点在超大规模集成电路工艺中获得了广泛的应用。
- OSTRIKOV K N,DENYSENKO I B,TSAKADZE E L,et al.Characteristics of electron cyclotron resonance plasmas for large area ion source application[J].Journ Vac Sci Technol,2000,A20:2185. 丁振峰;霍伟刚;王友年.;射频电感性耦合等离子体调谐基片自偏压特性[J]
- Abstract: The latest developments of high charge state ECR(electron cyclotron resonance)ion sources in Institute of Modern Physics, Chinese Academy of Sciences are reviewed. 文摘:综述了中国科学院近代物理研究所近几年来高电荷态ECR离子源的最新进展。
- Diagnostic test with Langmuir probe of the electron cyclotron resonance (ECR) plasma source was modified to evaluate our lab built ECR plasma etching system. 电子回旋共振(ECR)等离子体以其密度高、工作气压低、均匀性好、参数易于控制等优点在超大规模集成电路工艺中获得了广泛的应用。
- The latest developments of high charge state ECR(electron cyclotron resonance)ion sources in Institute of Modern Physics, Chinese Academy of Sciences are reviewed. 关键词：ECR离子源,高电荷态,束流强度,微波加热,磁镜场|全部关键词
